References

  

Data Sheets

SrTiO3 Target

Scope:

This product data sheet characterizes Strontium Titanate (SrTiO3 99.9%) targets produced by SCI Engineered Materials (SCI). The following information is not a specification; however, it may prove useful to the customer in developing a formal product specification. .

General Description:

SCI offers phase pure Strontium Titanate (SrTiO3) targets manufactured either by a CIP/Sinter process or by hot pressing. Targets smaller than 3 inches (diameter) are generally fabricated using CIP/Sinter process, whereas larger targets (> 3 inchess) are hot pressed. Smaller hot pressed targets are also available upon request.

In a typical CIP/Sinter process, phase pure powders are pressed uniaxially to a desired shape and then pressed isostatically (CIP). The green part is then sintered in a controlled atmosphere to achieve the desired density and grain size. Typical grain size of a CIP/Sinter target is about 2- 5 µm.

Larger SrTiO3 targets are sintered under pressure by hot pressing. SCI has the capability of hot pressing targets as large as 12 inch in diameter. Typical grain size of a hot pressed SrTiO3 target is about 1- 2 µm.

The sintered part is machined and generally bonded to a Copper cup/plate to produce sputtering targets. Targets for laser ablation are not bonded.

For quality control purposes, a coupon target is generally fabricated. The coupon target is characterized for phase purity by standard X-ray diffraction technique.

Typical X-ray diffraction pattern and the microstructure of CIP/Sintered and hot Pressed targets are shown below.

Typical Impurities (starting powder, in ppm):

Handling Instructions:

The targets should always be stored under vacuum. The targets are shipped in vacuum sealed polythene bags for your convenience. The targets may require periodic cleaning between depositions. It should never be touched with bare hands. For other information, please refer to MSDS sheet.