Data Sheets
LiCoO2 Target
Scope:
This product data sheet characterizes Lithium Cobalt Oxide (LiCoO2 99.9%)
targets produced by SCI Engineered Materials (SCI). The following information
is not a specification; however, it may prove useful to the customer in
developing a formal product specification.
General Description:
SCI offers Lithium Cobalt Oxide (LiCoO2) targets manufactured by (hot
pressing) and sintering. The dense blank is machined and generally bonded
to a Copper cup/plate to produce sputtering targets. Targets for laser
ablation are not bonded. The targets produced by this process are phase
pure with grain size about 2-5mm.
Photograph of a sputtering target and its typical microstructure
is shown below.
Typical Impurities (starting powder, in ppm):
Handling Instructions:
The targets should be stored always under vacuum. The targets are shipped
in vacuum sealed polythene bags for your convenience. The targets may
require periodic cleaning between depositions. It should never be touched
with bare hands. For other information, please refer to MSDS sheet.
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