Data Sheets
LaAlO3 Target
Scope:
This product data sheet characterizes Lanthanum Aluminate (LaAlO3 99.9%)
targets produced by SCI Engineered Materials (SCI). The following information
is not a specification; however, it may prove useful to the customer in
developing a formal product specification.
General Description:
SCI offers Lanthanum Aluminate (LaAlO3) targets manufactured by a CIP/Sinter
process. In a typical CIP/Sinter process, phase pure powders are pressed
uniaxially to a desired shape and then pressed isostatically (CIP). The
green part is then sintered in a controlled atmosphere to achieve the
desired density and grain size. The sintered part is machined and generally
bonded to a Copper cup/plate to produce sputtering targets. Targets for
laser ablation are not bonded. The targets produced by this process are
phase pure with grain size about 2-10 mm.
Typical X-ray diffraction pattern and the microstructure
of the target are shown below.
Handling Instructions:
The targets should be stored always under vacuum. The targets are shipped
in vacuum sealed polythene bags for your convenience. The targets may
require periodic cleaning between depositions. It should never be touched
with bare hands. For other information, please refer to MSDS sheet.
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