This product data sheet characterizes Lanthanum Strontium Cobalt Oxide (La-Sr-Co-O 99.9%) targets produced by SCI Engineered Materials™ (SCI). The following information is not a specification; however, it may prove useful to the customer in developing a formal product specification.
SCI offers Lanthanum Strontium Cobalt Oxide (La-Sr-Co-O) targets manufactured by a CIP/Sinter process. In a typical CIP/Sinter process, phase pure powders are pressed uniaxially to a desired shape and then pressed isostatically (CIP). The green part is then sintered in a controlled atmosphere to achieve the desired density and grain size. The sintered part is machined and generally bonded to a Copper cup/plate to produce sputtering targets. Targets for laser ablation are not bonded. The targets produced by this process are phase pure with grain size of about 2-8 mm. Targets with standard composition of La0.5Sr0.5CoOx are generally offered. However, targets with customized stochiometry and dopings are also available on request.
For quality control purposes, a coupon target is generally fabricated. The coupon target is characterized for phase purity by standard X-ray diffraction technique.
Typical Impurities (starting powder, in ppm):
The targets should always be stored under vacuum. The targets are shipped in vacuum sealed polythene bags for your convenience. The targets may require periodic cleaning between depositions. It should never be touched with bare hands. For other information, please refer to MSDS sheet.
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