Data Sheets
CeO2 Target
Scope:
This product data sheet characterizes Cerium Oxide (CeO2 99.9%) targets
produced by SCI Engineered Materials (SCI). The following information
is not a specification; however, it may prove useful to the customer in
developing a formal product specification.
General Description:
SCI offers Cerium Oxide (CeO2) targets manufactured by a CIP/Sinter process.
In a typical CIP/Sinter process, phase pure powders are pressed uniaxially
to a desired shape and then pressed isostatically (CIP). The green part
is then sintered in a controlled atmosphere to achieve the desired density
and grain size. The sintered part is machined and generally bonded to
a Copper cup/plate to produce sputtering targets. Targets for laser ablation
are not bonded. The targets produced by this process are phase pure with
grain size of about 2- 5 mm.
Photograph of a 6 inch diameter target, x-ray diffraction
pattern and the microstructure of a typical CeO2 target are shown below.
Handling Instructions:
The targets should always be stored under vacuum. The targets are shipped
in vacuum sealed polythene bags for your convenience. The targets may
require periodic cleaning between depositions. It should never be touched
with bare hands. For other information, please refer to MSDS sheet.
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